Ti6Al4V single beads were prepared by electron beam freeform fabrication (EBF3) to investigate their geometry, microstructure, composition and the resulting hardness in terms of the wire-feed rate, beam power and travel speed. Results showed that an increased wire-feed rate favored to increase the deposition efficiency and geometry accuracy, but it required an affordable heat input to success in deposition. The narrowed columnar β grains filled with the fine microstructural features inside and the decreased Al evaporation loss were available at an increased wire-feed rate/travel speed or a decreased beam power, which was attributed to the decreased temperature and dimension of molten pool. Therefore, the beads produced at such process variables possess the increased hardness. This investigation reveals the correlation between the process parameters and the process outcomes of deposited beads, which offers a valuable guidance for accurate manufacturing of multi-layered components with reliable microstructure and mechanical properties.