郑晓华,刘涛,杨烁妍,王贡启,杨芳儿.磁控溅射WSx/W/DLC/W多层膜的微观结构及摩擦学性能[J].稀有金属材料与工程,2020,49(4):1295~1300.[Zheng Xiao-hua,Liu Tao,Yang Shuo-yan,Wang Gong-qi,Yang Fang-er.Microstructure and tribological behavior of magnetron sputtered WSx/W/DLC/W multilayer films[J].Rare Metal Materials and Engineering,2020,49(4):1295~1300.]
磁控溅射WSx/W/DLC/W多层膜的微观结构及摩擦学性能
投稿时间:2019-05-06  修订日期:2019-10-03
中文关键词:  WSx  类金刚石碳膜  W  多层膜  摩擦磨损
基金项目:浙江省自然科学基金资助(项目号LY15E010007)
中文摘要:
      采用磁控溅射技术在硅基底上交替沉积WSx、W以及DLC膜层制备WSx/W/DLC/W多层膜。利用X射线衍射仪、扫描电镜、纳米压痕仪等对多层膜的微观结构和力学性能进行了表征,使用球盘式摩擦磨损试验机测试了多层膜在大气中的摩擦学性能。结果表明:多层膜表面均光滑致密。随着周期中W单层厚度的增加,多层膜中出现α-W、W2C和 β-WC1-x结晶相,多层膜的硬度大幅提高(6 nm时具有极大值17.3 GPa),摩擦因数呈下降趋势,结合力逐渐降低,磨损率先降低后升高。W单层厚度为6 nm的多层膜的耐磨性能最佳,磨损率约为1.4×10-14 m3N-1m-1。
Microstructure and tribological behavior of magnetron sputtered WSx/W/DLC/W multilayer films
英文关键词:WSx, diamond like carbon, W, multilayer films, friction and wear
英文摘要:
      WSx/W/DLC/W multilayer films were prepared by using magnetron sputtering technique and alternate deposition of WSx, W and diamond-like carbon (DLC) layers on silicon substrates. The microstructure, mechanical properties and tribological behaviors in the atmosphere of the films were characterized by X-ray diffractometry, scanning electron microscopy, nano-indenter and ball-on-disk wear tester. The results show that the surface of all the multilayer films is smooth and dense. As the thickness of single W interlayer increases in the modulation period, α-W, W2C, and β-WC1-x crystalline phases are formed in the multilayer films. The hardness of the multilayer films is greatly improved (up to 17.3 GPa at single W interlayer thickness of 6 nm), the friction coefficient shows a downward trend, the adhesion to the substrate is gradually reduced and the wear rate decreases first and then increases. The multilayer film with single W interlayer thickness of 6 nm exhibits the best wear resistance, its wear rate is about 1.4×10-14 m3N-1m-1.
作者单位E-mail
郑晓华 浙江工业大学 材料科学与工程学院 zhengxh@zjut.edu.cn 
刘涛 浙江工业大学 材料科学与工程学院 593840267@qq.com 
杨烁妍 浙江工业大学 材料科学与工程学院  
王贡启 浙江工业大学 材料科学与工程学院  
杨芳儿 浙江工业大学 材料科学与工程学院  
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