聂祥龙,马大衍,马飞,徐可为.HOPG上ALD沉积Al2O3介电薄膜的生长行为研究[J].稀有金属材料与工程,2018,47(1):64~68.[Nie Xianglong,Ma Dayan,Ma Fei,Xu Kewei.Growth behavior evolution of Al2O3 deposited on graphite by atomic layer deposition[J].Rare Metal Materials and Engineering,2018,47(1):64~68.]
HOPG上ALD沉积Al2O3介电薄膜的生长行为研究
投稿时间:2016-12-06  修订日期:2016-12-06
中文关键词:  Al2O3  HOPG  原子层沉积  生长行为
基金项目:
中文摘要:
      本文采用原子层沉积(ALD)的方法,选择三甲基铝(TMA)和H2O2作为反应前驱体,在高定向热解石墨(HOPG)基体上沉积Al2O3。系统研究了反应温度和生长周次对Al2O3生长行为的影响。研究表明:受HOPG表面饱和成键的影响,Al2O3在衬底表面处形核困难,在生长初期主要表现为台阶处择优生长,其形态为线状结构。当沉积100周次Al2O3时,其中在沉积温度为50 °C、150 °C和200 °C时呈现为纳米线状结构,而在100 °C时呈现为非连续薄膜。随着生长周次的增加,不同温度下沉积态Al2O3都趋于形成连续薄膜,表明其生长行为发生了由三维岛状生长模式向二维平面生长模式的转变。分析认为,生长模式的转变是由纳米线状结构横向生长造成的;横向生长速率主要受生长温度影响。拉曼结果表明:沉积后的石墨烯层结构未受影响,可保留其原有的优越性能。
Growth behavior evolution of Al2O3 deposited on graphite by atomic layer deposition
英文关键词:Al2O3  HOPG  atomic layer deposition  growth behavior
英文摘要:
      Al2O3 dielectrics were fabricated on highly ordered pyrolytic graphite (HOPG) by atomic layer deposition (ALD) and the effects of growth temperatures and number of ALD cycles on growth behaviors were studied. It is found that Al2O3 preferentially grows along the step edges which promote the formation of Al2O3 nanowires at the initial stage. Al2O3 nanowires can exist after 100 ALD cycles at 50, 150, and 200 °C, but discontinuous Al2O3 thin films rather than nanowires are evidenced at 100 °C. Moreover, the Al2O3 layers evolve into continuous thin films with increasing number of ALD cycles. It suggests the growth behavior undergoes a transition from three-dimensional mode to quasi two-dimensional mode with increasing number of ALD cycles. The rates of transition and lateral growth are dependent on growth temperatures. Raman spectra indicate that HOPG maintains undamaged and greatly reserves its original properties after the deposition of Al2O3. The results are of great significance to the fabrication of high-quality dielectric layers on graphene as well as the related devices.
作者单位E-mail
聂祥龙 西安交通大学 金属材料强度国家重点实验室 yzdelei@163.com 
马大衍 西安交通大学 金属材料强度国家重点实验室 madayan@mail.xjtu.edu.cn 
马飞 西安交通大学 金属材料强度国家重点实验室  
徐可为 西安交通大学 金属材料强度国家重点实验室  
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