Shahid Imran,尹格,元军,马云贵,何赛灵.FeGaB (25 nm)/Al2O3/FeGaB(25 nm)多层薄膜结构:氧化铝(Al2O3)厚度变化对静态与动态磁性能的影响[J].稀有金属材料与工程,2018,47(7):1951~1957.[Shahid Imran,Ge Yin,Jun Yuan,Yungui Ma,Sailing He.FeGaB(25 nm)/Al2O3/FeGaB(25 nm) multilayer structures: Effects of variation of thickness of aluminum oxide (Al2O3) on static and dynamic magnetic properties[J].Rare Metal Materials and Engineering,2018,47(7):1951~1957.]
FeGaB (25 nm)/Al2O3/FeGaB(25 nm)多层薄膜结构:氧化铝(Al2O3)厚度变化对静态与动态磁性能的影响
投稿时间:2016-12-29  修订日期:2017-04-07
中文关键词:  铁镓硼  多层结构  氧化铝  软磁性能
基金项目:
中文摘要:
      铁镓(FeGa)薄膜与其它软磁材料相比具有较大的磁致伸缩常数,在设计集成磁性传感器芯片中具有独特的优势,本文通过采用非磁性掺杂和多层膜方法来控制这种合金薄膜的磁学与电学性能参数。我们实验发现在掺杂一定量硼(B)元素后,厚度小于30 nm的FeGa薄膜顽力可以得到显著降低,而对于较厚薄膜在插入超薄Al2 O3中间层后软磁性能可以得到同样程度显著改善,同时饱和磁化(Ms)变化可忽略。对于我们制备的FeGaB (25 nm)/Al2O3(0.5 nm)/FeGaB(25 nm)多层膜,其易轴矫顽力可以小到0.98 Oe,电阻率与50nm单层FeGaB膜相比增加了1.5倍,同时具有吉赫兹高磁导率谱。样品微结构分析表明,磁性颗粒结晶质量和物理尺寸的减小对软磁性改善起到重要作用,另外我们也讨论分析了静磁相互作用和表面形貌对磁畴运动及矫顽力的影响。本文发展的掺杂与多层膜混合方案来来增强电磁性能的方法,也可应用于其他类型的软磁材料系统。
FeGaB(25 nm)/Al2O3/FeGaB(25 nm) multilayer structures: Effects of variation of thickness of aluminum oxide (Al2O3) on static and dynamic magnetic properties
英文关键词:Iron-gallium boron  multilayer structure  aluminum oxide  soft magnetic properties
英文摘要:
      Iron-gallium (FeGa) thin film has the unique advantages in designing integrated magnetic sensors or chips due to its relatively large magnetostrictive constant compared with other soft magnetic materials. In this work, non-magnetic doping and laminating methods have been employed to control the magnetic and electric properties of this alloy film. By doping certain amount of boron (B), the coercivities are largely decreased for samples of thickness less than ~30 nm. For thicker films, we find that inserting an ultrathin Al2O3 middle layer is very helpful to control the coercivities with negligible influence on saturation magnetization (Ms). The smallest easy-axis coercivity of 0.98 Oe is obtained in the multilayer film FeGaB(25nm)/ Al2O3(0.5nm)/ FeGaB(25nm). In this case, the resistivity is enhanced by 1.5 times compared with the 50 nm single layer film. Structural characterizations were carried out, which indicate the reductions of crystalline quality and physical dimension of the magnetic grains playing important roles in softening the magnetic properties. Besides, the influences of magnetostatic interaction and morphology characteristics are also considered in facilitating domain reversal. High permeability spectra with gigahertz response are obtained for our multilayer films. The methodology applied here, i.e., enhancing magnetic and electric performance by introducing ultrathin non-magnetic layers, could be translated to other species of soft magnetic materials as well.
作者单位E-mail
Shahid Imran 华师-浙大联合光子研究中心 shahidimran_77@yahoo.com 
尹格 State Key Lab of Modern Optical Instrumentation,Centre for Optical and Electromagnetic Research,College of Optical Science and Engineering,Zhejiang University, Hangzhou,China  
元军 State Key Lab of Modern Optical Instrumentation,Centre for Optical and Electromagnetic Research,College of Optical Science and Engineering,Zhejiang University, Hangzhou,China  
马云贵 State Key Lab of Modern Optical Instrumentation,Centre for Optical and Electromagnetic Research,College of Optical Science and Engineering,Zhejiang University, Hangzhou,China  
何赛灵 华师-浙大联合光子研究中心  
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