Abstract:Ion-implantation has been carried out for the metal Be in different doses,and the surface microhardness has been measured after the ion implantation.The hardness of the surface layers ion-implanted has been calculated by the Jonsson hardness model from the measured hardness and analysed as a function of implanted doses for the harden mechanism of implantation.The results showed that the hardness of Be increased by a factor of 9 after ion-implantation.