Effect of Substrate Temperature and Nitrogen Flow Rate on (Ti, Al) N Coating Properties

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Effect of Substrate Temperature and Nitrogen Flow Rate on (Ti, Al) N Coating Properties
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                        Wang Yongkang, Cheng Xiangyu, Wang Weiming,Gu Xiaohong, Li BingshengWang Yongkang, Cheng Xiangyu, Wang Weiming,Gu Xiaohong, Li Bingsheng

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[Wang Yongkang, Cheng Xiangyu, Wang Weiming, Gu Xiaohong, Li Bingsheng. Effect of Substrate Temperature and Nitrogen Flow Rate on (Ti, Al) N Coating Properties[J]. Rare Metal Materials and Engineering,1994,(3):55~58.]
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