To study the effect of substrate materials on the texture of magnetron sputtered indium, the UBM(Under Bump Metallization) of Cr/Au film, single crystal (111) InSb and amorphous photoresist were employed as substrate materials. The results indicate that the patterns of the indium textures are almost independent of the substrate materials, and the texture components consist of a strong (101) fiber texture and a weak (110) fiber texture. The texture mode proves that the texture forming mechanism of indium is a growth competition phenomenon.