Struture of PtSi/p-Si Nanometer Films Prepared by Sputtering
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[Yin Jinghua, Cai Wei, Li Meicheng, Zhao Liancheng . Struture of PtSi/p-Si Nanometer Films Prepared by Sputtering[J]. Rare Metal Materials and Engineering,2003,(9):707~710.] DOI：[doi]