Technological Development of Preparing Nanosized ITO Powder and Ultra High Density ITO Target
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Abstract:
Technological methods of preparing indium tin oxide(ITO) powder and ITO sputtering target are summarized and some remark on them are made in this paper. The various preparing procedures and the principles of the technology methods are recommend and analyzed. Relative merits of these methods are investigated, furthermore, ideas of improvement on preparing good quality ITO powder and the target are proposed.
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[Zhang Weijia, Wang Tianmin, Mi bi, Hong Ke. Technological Development of Preparing Nanosized ITO Powder and Ultra High Density ITO Target[J]. Rare Metal Materials and Engineering,2004,33(5):449~453.] DOI:[doi]