Preparation of Iridium Films by MOCVD and Deposition Effectiveness Analysis
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[Hua Yunfeng, Chen Zhaofeng, Zhang Litong, Cheng Laifei. Preparation of Iridium Films by MOCVD and Deposition Effectiveness Analysis[J]. Rare Metal Materials and Engineering,2005,34(1):139~142.] DOI：[doi]