By analysis of impurity elements in HfO2 coating material, the influence of main impurity elements on the characteristic of coatings were studied. The results indicate that the metal elements and absorptive dielectric elements damage the HfO2 coatings. The more the Zr element content is, source center and form an the more the absorption is for the coatings in ultraviolet wave. The negative ion element will become the gas ejection in the process of evaporation of coating material, so decrease the damage threshold of the coatings.