New Super Hard Ti-Si-C-N Nanocomposite Coatings Deposited by Pulsed DC Plasma CVD
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[Chang Gengrong, Guo Yan, Ma Shengli, Xu Kewei. New Super Hard Ti-Si-C-N Nanocomposite Coatings Deposited by Pulsed DC Plasma CVD[J]. Rare Metal Materials and Engineering,2006,35(5):824~827.] DOI：[doi]