Abstract:TiO2 thin films pre-coated with CuO can induce the formation of their rutile type structure. The pre-coating process was completed through the deposit of TiO2 sol-gel onto a glass substrate smeared with a layer of Cu(CH3COO)2 solution. The photocatalysis activity of the TiO2 thin films obtained was improved significantly. When a Cu(CH3COO)2 solution of 1(wt)% was used in the so-called pre-coated process, the activity of formed thin films reached their maximum, 53% higher than the untreated TiO2 thin films. Experimental results reveal that the greater the deformation of TiO2 lattice and the more the rutile type structure in the thin films, the higher the photocatalysis activity the thin films possess. SEM shows that the particle size of TiO2 films pre-coated with CuO is finer than that of the original films. XPS analysis demonstrates the Ti3+ content in the TiO2 thin films increases also when pre-coated with CuO.