Sn and In soft metal films, Al2O3 ceramic film and In/Al2O3 dual film were prepared with ion beam deposition technique. Sliding friction characteristics of these films against U-Nb alloy pin were evaluated by a pin-disc tribometer and Scan Electrical Microscopy (SEM). It had been found that the friction coefficients of sliding against SiC ceramics ball with smoothing surface decreased for the Sn and In films due to their very low strength, but increased against U-Nb alloy pin with engineering-coarse surface for the In film and In/Al2O3 dual film due to the adhesion between In and U-Nb alloy. Meantime, very thin Sn film resulted in increase of friction coefficient. The friction property would be improved only when the thickness of Sn film increased to a reasonable value. Otherwise, the friction coefficient of Al2O3 ceramics film against the U-Nb alloy with low strength did not decrease almost same as the results of Ta12W alloy because the U-Nb alloy was easy to be worn and transferred on the surface.