The titanium plates modified by NaOH alkali solution were immered into silane solution to prepare compact silane films on titanium substrate. The characteristics of the silane films were investigated by SEM, FTIR, EDS and surface contact angle analyzer. The results show that the different concentrations of silane solutions have greater effects on the surface morphology, the surface contact angle and the composition of surface groups of the silane film. The integrated silane film with lots of small close packing pieces is made as the samples dipped into silane solution with a concentration of 33% and surface contact angle of 71.8 °