SiC (carbon nitride) thin films were deposited on nanocrystalline titanium substrate (produced by severe plastic deformation) by magnetron sputtering technique at room temperature. The microstructure, nano-indentation and friction/wear properties of the SiC films were investigated. The results show that the SiC films are of nano-scale domain features for surface morphology, a large amount of Si-C bonds, good adhesion (with obvious and gradual film-substrate element diffusions as well as small film-substrate elastic modulus difference), low nano-hardness (10.62 GPa), low Young's modulus (83.34 GPa) and high hardness-to-modulus ratio (0.128). When sliding against Si3N4 ball (2 mm in radius) under room-temperature air condition and 1.96 N load, the SiC films exhibit the friction coefficient of about 0.162, and the special wear rate in the magnitude order of 10-5 mm3·m-1·N-1 with no film cracking and interface delaminating.