The effects of the processing parameters on the deformation behavior of Ti14 alloy containing a small volume of liquid have been investigated through compressive tests. Experiments were conducted at deformation temperatures from 1000 to 1150 °C, strain rates from 5×10-3 to 5 s-1 and deformation degrees from 40% to 70%. The results show that deformation temperature and strain rate have significant effects on the peak flow stress. The flow stress decreases with increasing of deformation temperature and/or decreasing of strain rate. The response time required by deformation is affected by the strain rate and liquid fraction is controlled by the temperature. As the temperature increases, deformation mechanism transforms from sliding between solid particles (SS) to the flow of liquid incorporating solid particles (FLS), which improves the semi-solid deformation behavior. In addition, the flow stress decreases with increasing of deformation degrees during the compression which is associated with lubricating effect of liquid during semi-solid deformation.