Transparent beryllium hydride (BeH2) films were prepared by the pyrolysis of di-t-butylberyllium etherate (t-Bu2Be·Et2O) under low pressure using metalorganic chemical vapor deposition (MOCVD) apparatus. The films were heated to 300 ℃ for dehydrogenation, and the released H2 was detected by gas chromatography. The XPS analysis shows that the surface layer of BeH2 film is BeO. The IR spectrum indicates that there exists Be-H-Be bend vibration