ITO powder precursors were prepared by chemical co-precipitation and then they were calcined at 600 °C for 4 h to obtain ITO powder with average particle size of 20~30 nm. 1%PVA was added to the ITO powder for granulation, and then the green compacts of ITO targets were prepared by a press forming method. Different heating rates were set, and then the ITO targets were produced by sintering at 1550 °C in oxygenated atmospheres. The effects of heating rate on relative density and microstructure of ITO target were studied during sintering process. The results show that when the heating rates are 3 °C /min (0~500 °C) and 8 °C /min (500~1550 °C), the heating system is better. The relative density of ITO target is 99.58%, the pores are hardly seen and the target is nearly fully densitified, in addition, no crack is observed from the macro perspective.