Influence of Substrate Temperature on the Microstructure of Sc and ScD2 Films
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Science Foundation of China Academy of Engineering Physics (2010A0301011); National Natural Science Foundation of China (50871106)
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Abstract:
Scandium films with thickness of ~ 2~3 μm were deposited on Mo substrates with a surface roughness Rq≈5~8.63 nm. Subsequently, the films were converted to scandium dideuteride (ScD2) in the Sievert’s apparatus. A novel substrate preparation process has
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[Wu Qingying, Bing Wenzeng, Long Xinggui, Zhou Xiaosong, Liu Jinhua, Luo Shunzhong. Influence of Substrate Temperature on the Microstructure of Sc and ScD2 Films[J]. Rare Metal Materials and Engineering,2013,42(7):1342~1346.] DOI：[doi]