A series of TaMoN composite films with different Mo contents were fabricated by a magnetron sputtering technique. The microstructures, morphology, phase composition, mechanical and friction properties of the films were investigated by X-ray diffraction (XRD), scanning electron microscopy (SEM) and equipped EDS, nano-indentation, and CSM high-temperature ball-on-disc tribo-meter. The results show that the microstructure of TaMoN composite films is a poly-phase structure consisting of cubic, hexagonal and orthorhombic structure by adding Mo element to TaN film. The hardness of TaMoN composite film is higher than that of TaN monolayer film due to the solid solution strengthening. The friction coefficients of TaMoN films at room and high temperatures are lower than that of TaN film, and the reasons were analyzed based on the morphology and wear tracks formed at different temperatures.