Effect of nitrogen–oxygen ratio on structure and optical properties of AlO<sub>x</sub>N<sub>y</sub> films

Home > Archive>Volume 47, Issue 3, 2018 >972-975

Effect of nitrogen–oxygen ratio on structure and optical properties of AlOxNy films
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                        Jian–ping MengJian–ping Meng
Department of Energy Material and Technology,General Research Institute for Nonferrous Metals
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Miao DuMiao Du
Department of Energy Material and Technology,General Research Institute for Nonferrous Metals
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Xiao–peng LiuXiao–peng Liu
Department of Energy Material and Technology,General Research Institute for Nonferrous Metals
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Zhi–qiang FuZhi–qiang Fu

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Lei HaoLei Hao
Department of Energy Material and Technology,General Research Institute for Nonferrous Metals
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Affiliation:Department of Energy Material and Technology,General Research Institute for Nonferrous Metals,Department of Energy Material and Technology,General Research Institute for Nonferrous Metals,Department of Energy Material and Technology,General Research Institute for Nonferrous Metals,,Department of Energy Material and Technology,General Research Institute for Nonferrous Metals
Clc Number:TQ603. 1
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Abstract:

The effect of nitrogen–oxygen ratio on composition, micro–structure and optical properties of AlO_xN_y films deposited by ion beam assisted deposition (IBAD) was investigated by using XPS, XRD and spectroscopic ellipsometry. As the ratio of nitrogen to oxygen decreases, the content of nitrogen in the films decreases, whereas, the content of oxygen in the films increases; at the same time, the amorphous phase in the films transfer to AlON phase. The zero value for extinction coefficient of the films indicates the deposited films are dielectric materials. And the refractive index of films within the whole wavelength range decreases with decreasing the ratio of nitrogen to oxygen.

Key words:AlO_xN_y films; nitrogen-oxygen ratio; IBAD; refractive index; extinction coefficient

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[Jian–ping Meng, Miao Du, Xiao–peng Liu, Zhi–qiang Fu, Lei Hao. Effect of nitrogen–oxygen ratio on structure and optical properties of AlO_xN_y films[J]. Rare Metal Materials and Engineering,2018,47(3):972~975.]
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Received:January 15,2016
Revised:May 24,2016
Adopted:June 12,2016
Online: April 11,2018
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