By adding SiC micro-particles with different sizes to the electrolyte, micro-arc oxidation (MAO) technique was employed to fabricate oxide ceramic layer of Ti-6Al-4V alloys reinforced by SiC micro-particles. Scanning electron microscope, X-ray diffractometer and ball-on-disk sliding tester were used to analyze surface topography, phase composition and tribological properties of the prepared samples, respectively. The result showed that SiC micro-particles have significant effects on the surface topography and tribological properties of the reinforced layer. SiC particles with smaller sizes would reduce the porosity and improve the density and tribological property of Ti-6Al-4V alloys dramatically, especially for SiC particles with the diameter of 1~2μm. By contrast, larger SiC particle can not go through the pores in the oxide layer for its larger size, so that the wear resistance property of the oxidation layer was improved slightly.