The precipitation behavior of second phase particles (SPPs) of Zr-Sn-Nb-Fe-Cr-Cu alloy after 6% and 12% pre-compressed deformation during aging was investigated by scanning electron microscope (SEM) and transmission electron microscope (TEM). It was found that the pre-deformation has a marked influence on precipitation behavior of Zr alloy. The average size of SPPs of 12% pre-compressed deformation samples was about 10nm larger than that of 6% pre-compressed deformation; and the average size of SPPs was linearly inversely proportional to the volume fraction of pre-deformation when the alloy was aging at 600℃. From TEM observation, the precipitates of orthorhombic Zr3Fe containing Cu element were detected when Zr alloys were aged at 550℃ for 30 minutes; the precipitates of hexagonal Zr(Fe,Nb)2 were also found with smaller size to Zr3Fe when the aging time prolonged to 1800 minutes. The pre-deformation has no remarkable impact on the type of SPPs.