In this investigation, the Ti-Al-V flat ingots were fabricated by electron beam cold hearth melting (EBCHM), the chemical composition and melting process of the flat ingots were compared and analyzed. The experimental results showed that the stability of chemical composition in the longitudinal direction was significantly affected by melting speed. As the melting speed increased, the Al content in the longitudinal direction was also increased and vice versa. The chemical compositions of the flat ingots were all uniform and the segregation of element Al was not found in this experimental condition. Through the analysis of the flowing characteristics of melt in three stages of EBCHM, it showed that the Machlin model was not applicable to the mass transfer of melt boundary layer in cold hearth and crystallizer. The calculation method of aluminum volatilizing flux in three stages including the melting of raw materials, cold hearth melting and the solidification process of molten alloy in mould were established. Results of calculation are in good agreement with that of experiment.