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Research progress of silver films / coatings deposited by magnetron sputtering
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State Key Laboratory of Advanced Technology for Comprehensive Utilization of Rare Metals,Kunming Institute of Precious Metals

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International Cooperation Program of Yunnan Province (2014IA037), Innovation Team Program of Yunnan Province (2019HC024), Technology Development Research Special Project of Scientific Research Institutes of Yunnan Science and Technology Department (2018DC004)

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    Abstract:

    Silver films / coatings is a kind of new material with great potential in the field of high and new technology, and has been extensively used in modern industry in recent years.SThe silver thin films/coatings prepared by magnetron sputtering have excellent adhesion. The microstructure and properties adjustment of silver thin films/coatings can be achieved by selecting appropriate deposition parameters.SIn this paper, the main preparation methods of silver thin films/coatings deposited by magnetron sputtering are summarized the research progress of silver thin films/coatings in its main application fields is reviewed, and the future development of silver thin films is prospected.

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[Ning Zheda, Wang Yiqing, Chen Tiantian, Tan Zhilong, Wen Ming. Research progress of silver films / coatings deposited by magnetron sputtering[J]. Rare Metal Materials and Engineering,2022,51(12):4773~4782.]
DOI:10.12442/j. issn.1002-185X.20220297

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History
  • Received:April 11,2022
  • Revised:June 15,2022
  • Adopted:July 12,2022
  • Online: January 19,2023
  • Published: December 30,2022