In order to explore the effects of Ti doping on the optical and mechanical properties of Ta₂O₅ coatings prepared by Ar/N₂-Ar co-sputtering, Ta₂O₅, N₂-Ta₂O₅, Ti-Ta₂O₅, and N₂-Ti-Ta₂O₅ coatings were prepared on the glass substrate surface by radio frequency and direct current magnetron co-sputtering techniques. The microstructures and surface morphologies of Ta₂O₅, N₂-Ta₂O₅, Ti-Ta₂O₅, and N₂-Ti-Ta₂O₅ coatings were characterized by X-ray diffraction (XRD), scanning electron microscope (SEM), and atomic force microscope (AFM). The optical parameters of the coatings were tested by ultraviolet-visible spectrophotometry. The hardness and Young's modulus of the coatings were tested by nanoindentation. XRD test results show that the Ta₂O₅, N₂-Ta₂O₅, Ti-Ta₂O₅, and N₂-Ti-Ta₂O₅ coatings mainly consist of amorphous phase structure with Ta₂O₅ as the main body. SEM and AFM results show that the coatings deposited on the glass substrate do not have extensive voids. The sputtered particles are uniformly piled and grow on the substrate surface. The coating thicknesses are basically the same and the thickness error is within 5%. The separate introduction of N₂, Ti, and N₂-Ti co-doping can reduce the roughness of Ta₂O₅ coatings. The optical test results show that the separate introduction of N₂ and Ti element can increase the average transmittance of Ta₂O₅ coatings to more than 81%, whereas the average transmittance of N₂-Ti-Ta₂O₅ coatings prepared by N₂-Ti co-doping reduces. Mechanical test results show that compared with that of Ta₂O₅ coating, the hardness of N₂-Ta₂O₅ and N₂-Ti-Ta₂O₅ coatings increases significantly. The hardness of Ti-Ta₂O₅ coatings is basically the same. The elasticity index (H/E) and plasticity index (H³/E²) indicate that the N₂-Ta₂O₅ and N₂-Ti-Ta₂O₅ coatings possess better fracture toughness and plastic deformation resistance. The preparation of N₂- and Ti-doped Ta₂O₅ coatings on glass surface can obtain the multifunctional coatings with both excellent optical and mechanical properties, which is represented by N₂-Ta₂O₅ and N₂-Ti-Ta₂O₅ coatings.