WMoTaNbV refractory high-entropy alloy spherical powder was prepared by mechanical alloying and radio frequency plasma spheroidization using elemental powder as raw material. Focused on studying the influence of ball milling time and radio frequency plasma spheroidization process on powder phase, morphology, particle size and impurity content, and used X-ray diffractometer, scanning electron microscope, transmission electron microscope, carbon sulfur meter, oxygen nitrogen and hydrogen meter and Laser particle size analyzer, etc. are used to analyze and characterize the powder properties. The results show that as the ball milling time increases, the low melting point elements gradually become solid solution to the high melting point elements. When the ball milling time is 14 h, refractory high-entropy alloy powder with a single BCC phase structure can be formed. The particle size gradually becomes refined with the prolongation of the ball milling time, and the impurity content increases with the prolongation of the ball milling time. Powder milled for 2 h was selected for radio frequency plasma spheroidization. The median particle size of the spheroidized powder was 66.0 μm, the oxygen and carbon contents were 540 ppm and 210 ppm respectively, and the powder flowability was significantly improved to 8.4 s·(50 g)? 1, the tap density reaches 8.80 g·cm?3.