+Advanced Search
Microstructure and Tribological Properties of CrN Films Deposited by Direct Current Magnetron Sputtering
DOI:
Author:
Affiliation:

School of Materials and Engineering,Jiangxi University of Science and Technology,Ganzhou,School of Materials and Engineering,Jiangxi University of Science and Technology,Ganzhou,School of Materials and Engineering,Jiangxi University of Science and Technology,Ganzhou,Engineering Research of Center of High-efficiency Development and Application Technology of Tungsten Resources,Ministry of Education,Ganzhou,Engineering Research of Center of High-efficiency Development and Application Technology of Tungsten Resources,Ministry of Education,Ganzhou,School of Materials and Engineering,Jiangxi University of Science and Technology,Ganzhou

Clc Number:

Fund Project:

  • Article
  • |
  • Figures
  • |
  • Metrics
  • |
  • Reference
  • |
  • Related
  • |
  • Cited by
  • |
  • Materials
  • |
  • Comments
    Abstract:

    CrN films were deposited on 304 stainless steel by DC reactive magnetron sputtering. The effects of nitrogen flow on the microstructure, mechanical and tribological properties were characterized by X-ray diffraction, scanning electron microscopy, atom force microscope, microhardness, wear tester and Nanomap 500LS profile. The results showed that with the increase of nitrogen flow, the CrN films exhibited a preferential orientation in the (200) direction. The deposition rate of CrN films decrease with the increase of nitrogen flow. Besides, the surface roughness exhibited the tendency of decrease first and then increase with further increase of nitrogen flow. As nitrogen flow increased from 15 to 30 sccm, microhardness was improved from 527.34 HV to 1042.26 HV, and then decrease to 918 HV when the nitrogen flow further increase to 35 sccm. Wear test showed that the CrN films deposited at nitrogen flow of 30 sccm was achieved lowest friction coefficient with 0.93 and wear rate with 2.02×10-15m3·(N·m)-1, which presented best wear resistance performance.

    Reference
    Related
    Cited by
Get Citation

[Ren Xingrun, Zhang Qinying, Huang Zhu, Su Wei, Yang Jiangao, Chen Hao. Microstructure and Tribological Properties of CrN Films Deposited by Direct Current Magnetron Sputtering[J]. Rare Metal Materials and Engineering,2018,47(8):2283~2289.]
DOI:[doi]

Copy
Article Metrics
  • Abstract:
  • PDF:
  • HTML:
  • Cited by:
History
  • Received:January 08,2017
  • Revised:June 07,2017
  • Adopted:June 26,2017
  • Online: October 17,2018
  • Published: