制取硬质耐磨涂层的物理气相沉积方法

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Abstract:

本文着重讨论沉积硬质耐磨涂层的物理气相沉积方法、涂层结构和性能的关系及硬质涂层的各种应用。

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[.[J]. Rare Metal Materials and Engineering,1982,(6).]
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