The Influence of Low-Energy Ion Beams Bombardment on Microstructure and Properties of Ti and Ti-N Films

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The Influence of Low-Energy Ion Beams Bombardment on Microstructure and Properties of Ti and Ti-N Films
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                        Zeng Peng,Hu Shejun,Xie Guangrong,Huang Nacan,Wu QibaiZeng Peng,Hu Shejun,Xie Guangrong,Huang Nacan,Wu Qibai

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[Zeng Peng, Hu Shejun, Xie Guangrong, Huang Nacan, Wu Qibai. The Influence of Low-Energy Ion Beams Bombardment on Microstructure and Properties of Ti and Ti-N Films[J]. Rare Metal Materials and Engineering,2002,(3):175~178.]
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