Effect of Sputtering Gas Pressure on Wear Resistance and Corrosion Resistance of Niobium Films Prepared by Magnetron Sputtering Deposition

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Effect of Sputtering Gas Pressure on Wear Resistance and Corrosion Resistance of Niobium Films Prepared by Magnetron Sputtering Deposition
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                        Cui Jiangtao,Tian Xiubo,Hu Xindong,Yang ShiqinCui Jiangtao,Tian Xiubo,Hu Xindong,Yang Shiqin

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Key words:sputtering gas pressure; niobium film; wear resistance; corrosion resistance

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[1]Cui Jiangtao,Tian Xiubo,Hu Xindong,Yang Shiqin.Effect of Sputtering Gas Pressure on Wear Resistance and Corrosion Resistance of Niobium Films Prepared by Magnetron Sputtering Deposition[J].Rare Metal Materials and Engineering,2008,37(1):143-146.

[2]HE Jiang-tao,CAI Hai-chao and XUE Yu-jun.Effect of Deposition Pressure on Tribological Properties of WS2 Films by Magnetron Sputtering[J].Surface Technology,2020,49(4):180-187.

[3]CAI Hai-chao,XUE Yu-jun,WANG Jing-hu,YE Jun,HE Jiang-tao.Effect of Deposition Pressure on Structure and Tribological Properties of La-Ti/WS2 Composite Films Prepared by Magnetron Sputtering[J].Surface Technology,2020,49(7):168-174.

[4]LI Zhong-hou,GUO Teng-teng,GONG Xue-bo,MA Qin-qin and YANG Di.Research on Improving the Corrosion Resistance and Wear Resistance of Magnesium Alloy by Magnetron Sputtering Ti[J].Surface Technology,2014,43(6):121-124.

[5]SUN Kang,CUI Hong-zhi,TIAN Shuo-shuo,SONG Xiao-jie and WANG Wei-guo.Effects of Zr Content on Microstructure and Corrosion Resistance of NiCrZr Thin Film Prepared by Magnetron Sputtering[J].Surface Technology,2019,48(2):186-192.

[6]JU Hongbo,HE Sheng,CHEN Tong,CHEN Min,GUO Liping,YU Lihua,XU Junhua.Effect of Base Pressure on Microstructure,Adhesion Strength and Corrosion Resistance of Ru Films Deposited via Magnetron Sputtering[J].Development and Application of Materials,2016(4).

[7]WU Fan.Structure and Corrosion Resistance of TiN Coating Prepared by Magnetron Sputtering on the Surface of 28CrMo Steel[J].Journal of Materials Protection,2017,50(5).

[8]WANG Jun,LIU Ying,DING Hong-yan.Corrosion Resistance Behavior of TiO2 Thin Films Prepared by Sputtering[J].Journal of Materials Engineering,2014(12):34-38.

[9]SUN Wei-lian,CHENG Yue,WANG Hui-qiang,LI Xin-ling,SUN Bo.Effect of Vacuum Magnetron Sputtering Parameters on Corrosion Resistance of Zirconium Nitride Films[J].Journal of Materials Protection,2012,45(5):42-43,62,87.

[10]Song Dengyuan,Wang Yongqing,Sun Rongxia,Zong Xiaoping and Guo Baozeng.Effect of Ar Pressure on Properties of ZnO∶Al Films Prepared by RF Magnetron Sputtering[J].Chinese Journal of Semiconductors,2002,23(10):1078-1082.

[11]ZHU Sheng-fa,LIU Tian-wei,WU Yan-ping,HUANG He,JIANG Fan,TANG Kai,WEI Qiang.XPS Analysis and Corrosion Resistance of CrN_x Film Prepared by Unbalanced Magnetron Sputtering on Surface of Depleted Uranium[J].Atomic Energy Science and Technology,2012,46(9):1128-1132.

[12]SUN Ke-Wei,ZHOU Wan-Cheng,HUANG Shan-Shan,TANG Xiu-Feng.Effect of Sputtering Pressure on Al-doped ZnO Films by DC Magnetron Sputtering[J].Journal of Inorganic Materials,2012(10):1212-1216.

[13]LI Qin-hu,WANG Jun.Oxidation Resistance of Magnetron Reactive Sputtering CrN Films[J].Surface Technology,2005,34(6):40-41,44.

[14]LIU Feng,MENG Yuedong,REN Zhaoxing,SHU Xingsheng.Microstructure,Hardness and Corrosion Resistance of ZrN Films Prepared by Inductively Coupled Plasma Enhanced RF Magnetron Sputtering[J].Plasma Science & Technology,2008,10(2):170-175.

[15]ZHAO Xiu-ling.Effect of Deposition Temperature on ITO Thin Films Prepared by RF Magnetron Sputtering[J].Journal of Optoelectronics·laser,2005,16(12):1429-1432.

[16]WANG You-xin,MAO Ming-xu,WANG Ying-cai,SHAN Yu-qiao.Preparation of TiN Thin Films by DC Reactive Magnetron Sputtering[J].China Surface Engineering,2013,26(2):61-65.

[17]YANG Lina,DING Zengqian,LI Ruiying,ZHOU Boyi,XIONG Kanglin,FENG Jiagui,ZHANG Yonghong.Deposition of Niobium Films by Ultra-High-Vacuum Magnetron Sputtering[J].JOurnal of Vacuum Science and Technology,2021,41(7):607-612.

[18]TIAN Yi-lan,YANG Yi-ni,TANG Chun-mei,LIU Zhong-wu.Deposition of Ni Films on Sintered NdFeB Magnets and Its Corrosion Resistance[J].Journal of Materials Protection,2017,50(4).

[19]YIN Congpeng,GUAN Weiming,ZHANG Junmin,LIU Hongjiang,CHEN Yong and ZHANG Kunhua.Study of Ru-B Films Prepared by Magnetron Sputtering[J].Precious Metals,2013,34(2):05-9,14.

[20]Huang He,Wang Xuegang,Zhu Xiaodong,Chen Hu,He Jiawen.Ion-beam Assisted Magnetron Sputtering Deposition of Titanium Nitride Films[J].Rare Metal Materials and Engineering,2002,31(3):205-208.

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[Cui Jiangtao, Tian Xiubo, Hu Xindong, Yang Shiqin. Effect of Sputtering Gas Pressure on Wear Resistance and Corrosion Resistance of Niobium Films Prepared by Magnetron Sputtering Deposition[J]. Rare Metal Materials and Engineering,2008,37(1):143~146.]
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Received:January 25,2007
Revised:January 25,2007
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