Diamond-like carbon films (DLC) doped with W for different time on Si substrate surface were prepared by KrF pulsed excimer laser ablution deposition (PLD) technique. The surface morphology, microstructure and some properties of the films were researched by AFM, XRD, Raman spectra and nano indenter. Results show that α-W2C and WC phases were formed after W doping, but the content of sp2 and sp3 in the film did not change obviously. The surface roughness was not sensitive to the W doping time. W doping resulted in the decrease of the residual stress by a magnitude (from higher than 20 GPa to several GPa). Meanwhile, the hardness and modulus of the films were decreased with increasing of W doping time.