Quartz/ZnO/TiNi and quartz/TiNi/ZnO multilayer films were prepared by RF magnetron sputtering process on the quartz substrate. The phase composition, microstructure and mechanical properties of the multilayer films were investigated by XRD, SEM and scratch test methods, respectively. The change rule of the damping capability with the frequency and amplitude was investigated by DMA for quartz/TiNi and quartz/ZnO/TiNi multilayer films. Results show that the frequency response of quartz/TiNi is within 10 Hz, while that of quartz/ZnO/TiNi almost reaches to 20 Hz. The damping amplitude of quartz/ZnO/TiNi is 1.0 V, while that of quartz/TiNi is only 0.6 V. The damping capability of quartz/ZnO/TiNi is superior to that of quartz/TiNi. The critical adhesion forces between the multilayer thin film and quartz substrate for quartz/ZnO/TiNi and quartz/TiNi are 45.75 N and 40.15 N, respectively