Lithium hydride (LiH) is one important thermo nuclear materials and its equation of state (EOS) date is of importance in inertial confinement fusion. In this paper, LiH film was produced by vacuum hot pressing technology. Process parameters were given below: vacuum was less than 5.0×10-4 Pa, the temperature was 450 °C, calefactive velocity 10 °C /min and the pressure from 4000 N/cm2 to 25000 N/cm2. The results indicate that thickness of LiH film is less than 100 μm, surface root mean square roughness less than 100 nm and thickness uniformity more than 98%. And the main component of film is LiH from XRD. LiH film has prefer-oriented, crystal-fined characteristic and internal stress.