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Deposition of La2Zr2O7 (LZO) Buffer Layer by a Reel-to-Reel Method
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    Abstract:

    Deposition of La2Zr2O7 (LZO) buffer layer by a reel-to-reel method was studied. The results indicate that it is a better way for fabricating a long tape that Ar-4%H2 mixed gas flows along the transversal direction of NiW substrate, and the pryolysed gases could be dissipated rapidly by this way, and the texture homogeneity of each part in the LZO film can be improved. It is also found that a small angle between the gas flow direction with the normal direction of the sample is beneficial to improve the texture of LZO film. The influence of the sample moving speed is due to the change of heat treatment time. After the treatment is optimized, a smooth and dense LZO film with sharp texture is deposited on a NiW substrate by a reel-to-reel method, and the texture sharpness of LZO film is similar to that of NiW substrate

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[Yu Zeming, Jin Lihua, Wang Yao, Li Chengshan, Zhang Pingxiang. Deposition of La2Zr2O7 (LZO) Buffer Layer by a Reel-to-Reel Method[J]. Rare Metal Materials and Engineering,2013,42(9):1953~1956.]
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  • Received:September 16,2012
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