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孟建平,杜淼,刘晓鹏,付志强,郝雷.氮氧比对AlOxNy薄膜结构和光学性能的影响[J].稀有金属材料与工程(英文),2018,47(3):972~975.[Jian–ping Meng,Miao Du,Xiao–peng Liu,Zhi–qiang Fu,Lei Hao.Effect of nitrogen–oxygen ratio on structure and optical properties of AlOxNy films[J].Rare Metal Materials and Engineering,2018,47(3):972~975.]
Effect of nitrogen–oxygen ratio on structure and optical properties of AlOxNy films
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Received:January 15, 2016  Revised:May 24, 2016
DOI:
Key words: AlOxNy films  nitrogen-oxygen ratio  IBAD  refractive index  extinction coefficient
Foundation item:太阳能吸收膜及平板集热器检测技术研究(2015BAA02B04)
Author NameAffiliationE-mail
Jian–ping Meng Department of Energy Material and Technology,General Research Institute for Nonferrous Metals mengjianping@126.com 
Miao Du Department of Energy Material and Technology,General Research Institute for Nonferrous Metals  
Xiao–peng Liu Department of Energy Material and Technology,General Research Institute for Nonferrous Metals xpgliu@126.com 
Zhi–qiang Fu 中国地质大学北京 工程技术学院  
Lei Hao Department of Energy Material and Technology,General Research Institute for Nonferrous Metals  
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Abstract:
      The effect of nitrogen–oxygen ratio on composition, micro–structure and optical properties of AlOxNy films deposited by ion beam assisted deposition (IBAD) was investigated by using XPS, XRD and spectroscopic ellipsometry. As the ratio of nitrogen to oxygen decreases, the content of nitrogen in the films decreases, whereas, the content of oxygen in the films increases; at the same time, the amorphous phase in the films transfer to AlON phase. The zero value for extinction coefficient of the films indicates the deposited films are dielectric materials. And the refractive index of films within the whole wavelength range decreases with decreasing the ratio of nitrogen to oxygen.