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Effect of nitrogen–oxygen ratio on structure and optical properties of AlOxNy films
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Department of Energy Material and Technology,General Research Institute for Nonferrous Metals,Department of Energy Material and Technology,General Research Institute for Nonferrous Metals,Department of Energy Material and Technology,General Research Institute for Nonferrous Metals,,Department of Energy Material and Technology,General Research Institute for Nonferrous Metals

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TQ603. 1

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    Abstract:

    The effect of nitrogen–oxygen ratio on composition, micro–structure and optical properties of AlOxNy films deposited by ion beam assisted deposition (IBAD) was investigated by using XPS, XRD and spectroscopic ellipsometry. As the ratio of nitrogen to oxygen decreases, the content of nitrogen in the films decreases, whereas, the content of oxygen in the films increases; at the same time, the amorphous phase in the films transfer to AlON phase. The zero value for extinction coefficient of the films indicates the deposited films are dielectric materials. And the refractive index of films within the whole wavelength range decreases with decreasing the ratio of nitrogen to oxygen.

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[Jian–ping Meng, Miao Du, Xiao–peng Liu, Zhi–qiang Fu, Lei Hao. Effect of nitrogen–oxygen ratio on structure and optical properties of AlOxNy films[J]. Rare Metal Materials and Engineering,2018,47(3):972~975.]
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History
  • Received:January 15,2016
  • Revised:May 24,2016
  • Adopted:June 12,2016
  • Online: April 11,2018
  • Published: