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Comparison of microstructure and tribological behaviors of CrAlN and CrN film- deposited by DC magnetron sputtering
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School of Materials and Engineering,Jiangxi University of Science and Technology,Ganzhou,School of Materials and Engineering,Jiangxi University of Science and Technology,Ganzhou,School of Materials and Engineering,Jiangxi University of Science and Technology,Ganzhou,Engineering Research of Center of High-efficiency Development and Application Technology of Tungsten Resources,Ministry of Education,Ganzhou,School of Materials and Engineering,Jiangxi University of Science and Technology,Ganzhou

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National Natural Science Foundation of China(Grant No.51464013), Project of Education Department of Jiangxi Province(Grant No.GJJ14414) and Innovation special funds for graduate students(Grant No.ZS201550), Program of Qingjiang Excellent Young Talents,Jiangxi University of Science and Technology

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    Abstract:

    CrAlN and CrN films were deposited on 304 stainless steel substrate by direct current magnetron sputtering. Effects of Al incorporation on the composition and microstructure for CrN film were investigated by X-ray diffraction (XRD), Scanning electron microscopy (SEM), X-ray photoelectrons spectroscopy (XPS), Atom force microscope (AFM) in the present work, respectively. The tribological behaviors of CrN and CrAlN films were characterized by wear tester against with a diameter of 3 mm Si3N4 ball under different conditions and the wear profiles of film were characterized by Nanomap 500LS. The results showed that the main phases of CrN film were CrN and Cr2N phase and the main phases of CrAlN film were Cr2N and CrAlN phases. The CrAlN film presented a CrAlN (200) preferred orientation and CrN film presented CrN (200) preferred orientation. In terms of CrAlN film, parts of Cr atoms were taken place by Al atoms forming the CrAlN phase which was benefited to refining grain and improving the comprehensive performance of CrAlN film. Therefore, CrAlN film exhibited an excellent wear-resistance performance and lower wear rate than CrN film in all the conditions.

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[Ren Xingrun, Huang Zhu, Liu Meixia, Jiangao Yang, Hao Chen. Comparison of microstructure and tribological behaviors of CrAlN and CrN film- deposited by DC magnetron sputtering[J]. Rare Metal Materials and Engineering,2018,47(4):1100~1106.]
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History
  • Received:June 08,2016
  • Revised:October 17,2016
  • Adopted:October 18,2016
  • Online: May 31,2018
  • Published: