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靳巧玲,王海斗,李国禄,张建军,刘金娜.TiN/CrN多层薄膜微观结构与力学性能的研究[J].稀有金属材料与工程(英文),2017,46(10):2857~2862.[Qiaoling Jin,Haidou Wang,Guolu Li,Jianjun Zhang and Jinna Liu.Microstructure and Mechanical Properties of TiN/CrN Multilayer Films[J].Rare Metal Materials and Engineering,2017,46(10):2857~2862.]
Microstructure and Mechanical Properties of TiN/CrN Multilayer Films
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Received:August 25, 2016  Revised:November 03, 2016
Key words: TiN/CrN multilayer films  microstructure  mechanical properties  periodicity  residual stress
Foundation item:国家自然科学基金重点项目 (51535011) 、国防973计划 (61328304)
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Qiaoling Jin,Haidou Wang,Guolu Li,Jianjun Zhang and Jinna Liu  
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      During the last past decades, TiN/CrN muiltilayer coatings have been extensively developed to improve the performance and lifetime of components due to their excellent mechanical properties. In order to study the relationship between mechanical properties and microstructure of TiN/CrN multilayer coatings, the TiN, CrN film and threeTiN/CrN multilayer films with different periodicities were prepared on monocrystalline silicon by magnetron sputtering. Atomic Force Microscope and X-ray diffraction were adopted to analyse the surface morphology and chemical construction of the films. The hardness and indentation plasticity were studied using nanoindenter. Residual stress was measured by curvature method. The results show that TiN/CrN multilayer films exhibit a mixture of TiN and Cr2N phases, the interface zone between TiN layer and CrN layer become small and sharp with the increasing of periodicity. Hardness and indentation plasticity of multilayer films are better than monolayer films, and increase as the bilayer period decreases. For multilayer films, the residual stress increases gradually with the increasing of periodicity. From the above observation, it can be concluded that the improvement in mechanical property depend on minor periodicity. The results agree well with Hall–Petch theory.