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张德胜,张勤,杨洪英.Au、Ge对银基合金靶材坯料耐硫化性能的协同作用[J].稀有金属材料与工程(英文),2019,47(3):987~993.[Zhang Desheng,Zhang Qin and Yang Hongying.Synergistic effect of Au and Ge on sulfide resistance of silver-based alloy targets[J].Rare Metal Materials and Engineering,2019,47(3):987~993.]
Synergistic effect of Au and Ge on sulfide resistance of silver-based alloy targets
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Received:August 01, 2017  Revised:August 18, 2017
DOI:
Key words: Ag-based alloys  Sputter target  Sulfidation resistanc  Au  Ge
Foundation item:国家自然科学基金资助(项目号U1608254 )
Author NameAffiliation
Zhang Desheng,Zhang Qin and Yang Hongying  
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Abstract:
      Silver-based alloy targets were prepared by self-designed melting-casting-stirring equipment. The influence of Au and Ge on the microstructure and property of silver-based alloy targets were studied. Our results indicated that with the addition of Au and Ge, the microstructure of silver-based alloy targets was refined, the second dendrite was shortened and the sulfidation resistance was increased; Furthermore, when the addition of Au and Ge reached 1.0 wt%, the silver-based alloy targets had best sulfidation resistance. Additionally the phenomenon of element segregation was aggravated with the increased of the addition of Au and Ge. Therefore, a few of clustering enrichment regions appeared at the grain boundaries of Ag1.5Cu0.1Y1.5Au alloy targets and the sulfidation resistance was decreased with the increased of the addition of Au and Ge.