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冯兴国,张凯锋,周晖,万志华,郑玉刚.Ti6Al4V合金表面离子注入N+C,Ti+N和Ti+C性能研究[J].稀有金属材料与工程(英文),2019,48(5):1447~1453.[Feng Xingguo,Zhang Kaifeng,Zhou Hui,Zheng Yugang and Wan Zhihua.Characterization of N+C,Ti+N and Ti+C ion implantation into Ti6Al4V alloy[J].Rare Metal Materials and Engineering,2019,48(5):1447~1453.]
Characterization of N+C,Ti+N and Ti+C ion implantation into Ti6Al4V alloy
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Received:December 24, 2017  Revised:March 05, 2018
Key words: ion implantation  XPS  hardness  wear
Foundation item:国家自然科学青年基金
Author NameAffiliation
Feng Xingguo,Zhang Kaifeng,Zhou Hui,Zheng Yugang and Wan Zhihua  
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      In this paper, TiN and TiC films were prepared on Ti6Al4V substrates by plasma based ion implantation. The effect of N+C and Ti+N hybrid ion implantation at 50 kV, and Ti+C ion implantation at 20 kV, 35 kV and 50 kV on mechanical properties was studied. The implantation was up to 2×1017 ions/cm2 fluence. XPS and XRD were used to characterize the modified surface of the implanted samples. It was found that the modified layer of Ti+C implanted at 50 kV was TiC and Ti-O bond and the layer of Ti+N implanted at 50 kV was TiN and Ti-O bond. The nano-hardness and the friction coefficient were measured by nano-indentation measurements and pin-on-disc-test. Hardness tests have shown that the hardness increased with N+C, Ti+N and Ti+C ion implantation. For Ti+C implanted samples, the hardness was increased with increasing negative voltage. The sample of implanted with Ti+C at 50 kV exhibited the highest hardness of 11.2 GPa. The results of wear tests showed that both Ti+C and Ti+N ion implanted samples had much better wear resistance compared un-implanted sample. The wear rate of Ti+C implanted at 50 kV sample was 6.7×10-5mm3/N.m, which was decreased over one order than un-implanted sample.