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孙川希,周增林,谢元锋,夏扬.Al0.7Sb2Te3三元靶材的结构性能表征[J].稀有金属材料与工程(英文),2019,48(7):2203~2207.[Sun Chuanxi,Zhou Zenglin,Xie Yuanfeng and Xia Yang.Structural performance characterization of Al0.7Sb2Te3 ternary target[J].Rare Metal Materials and Engineering,2019,48(7):2203~2207.]
Structural performance characterization of Al0.7Sb2Te3 ternary target
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Received:January 04, 2018  Revised:March 09, 2018
Key words: Al0.7Sb2Te3  XPS  valence  effective combination.
Foundation item:国家重点研发计划专项项目(2017YFB0306000)
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Sun Chuanxi,Zhou Zenglin,Xie Yuanfeng and Xia Yang  
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      Al0.7Sb2Te3ternary target was prepared by vacuum synthesis and sintering-HIP method by mixed powder with atom ratios of 0.7:2:3 as raw material. Target properties was characterized by means of XRD, FESEM, EDS and XPS, and the state of Al in the ternary target was researched primarily by XPS. The results show that with Aluminum doped, main phase Sb2Te3’s lattice constant decreases, and the Aluminum dispersoids can coexist together with Al0.1Sb2Te3 matrix, which mean the existence of effect on target organization structure with Aluminum doped; with etching depth increases from 0 to 405.9nm, the main content of Aluminum’s valence is gradually transferred from the compound state of Al2O3 to simple substance state, and the area depth of Aluminum’s form dominated by Al2O3 is about 90nm; with etched by 405.9nm, the Aluminum’s valence from non-oxide and Antimony’s valence from AlSb can certify the Aluminum of Al0.1Sb2Te3 matrix influences target organization structure by forming effectively AlSb.