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张腾,戴少涛,马韬,胡磊,王邦柱.反应动力学法评价MOCVD过程中金属有机盐的稳定性[J].稀有金属材料与工程(英文),2019,48(12):3824~3828.[Teng Zhang,Shaotao Dai,Tao Ma,Lei Hu and Bangzhu Wang.Evaluating the Thermostability of Metal Precursors in MOCVD by the Reaction Kinetic Analysis[J].Rare Metal Materials and Engineering,2019,48(12):3824~3828.]
Evaluating the Thermostability of Metal Precursors in MOCVD by the Reaction Kinetic Analysis
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Received:May 30, 2018  Revised:June 04, 2018
DOI:
Key words: YBCO  MOCVD  metal precursor  thermostability  reaction kinetic analysis
Foundation item:国家重点研发计划(2017YFB0902302),国家自然科学基金(51477165),中央高校基本科研业务费专项资金(2017RC009)
Author NameAffiliation
Teng Zhang,Shaotao Dai,Tao Ma,Lei Hu and Bangzhu Wang  
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Abstract:
      The sufficient and stable evaporation of metal precursors is crucial to obtain reproducible YBa2Cu3O7-δ (YBCO) film with high quality in MOCVD technique, and a practicalSSwaySis needed to evaluate the thermal stability of metal precursors in evaporation. In this work, the thermal properties and decomposition kinetics of three precursors with different evaporation characteristics (Y(DPM)3, Cu(DPM)2, Ba(DPM)2) were comparatively investigated by non-isothermal thermogravimetric analysis, and the apparent activation energy (Ea) of evaporation process was evaluated by the Ozawa, Kissinger and Friedman methods. The results show that the decomposition reaction of Ba(DPM)2 is indeed concomitant with its evaporation process and highly sensitive to the change of temperature. In addition, the consistent results from TGA-DSC and the kinetic analysis can also confirm that evaporation kinetics study is suitable for investigating the thermostability of metal-organic compound in MOCVD process.