The sufficient and stable evaporation of metal precursors is crucial to obtain reproducible YBa₂Cu₃O_7-δ (YBCO) film with high quality in MOCVD technique, and a practicalSSwaySis needed to evaluate the thermal stability of metal precursors in evaporation. In this work, the thermal properties and decomposition kinetics of three precursors with different evaporation characteristics (Y(DPM)₃, Cu(DPM)₂, Ba(DPM)₂) were comparatively investigated by non-isothermal thermogravimetric analysis, and the apparent activation energy (E_a) of evaporation process was evaluated by the Ozawa, Kissinger and Friedman methods. The results show that the decomposition reaction of Ba(DPM)₂ is indeed concomitant with its evaporation process and highly sensitive to the change of temperature. In addition, the consistent results from TGA-DSC and the kinetic analysis can also confirm that evaporation kinetics study is suitable for investigating the thermostability of metal-organic compound in MOCVD process.