). In this work, tribological properties of CrN/TiN superlattice coatings deposited on IN 718, WC-6%Co and Si(100) by the combined deep oscillation magnetron sputtering was investigated. Results show that the coating growth was independent of the nature of substrate materials. As the hardness of substrate materials was increased, the scratch critical loads increased. Adhesion failure mode changed from buckling failure to cooperative deformation of substrate/coating system with only small cracks in the whole scratch track. Wear mechanism of the coatings deposited on IN 718 and WC-6%Co changed from abrasive wear and oxidative to mild abrasive wear at a normal load of 2 N. Under normal load of 4 N, the coatings on IN 718 suffered serve oxidative wear, while the coatings on WC-6%Co suffered the combined abrasive and oxidative wear. The production, accumulation and mass transfer of oxides resulted in the oscillation of friction coefficient during dry sliding wear tests.