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黄兆岭,曾齐,李婉莹,黄金奖,秦水介,吴天准.神经刺激/记录fMEA的高性能3D结构铂纳米镀层的研究[J].稀有金属材料与工程(英文),2020,49(10):3536~3543.[Huang Zhaoling,Zeng Qi,Wanying Li,Huang Jinjiang,Qin Shuijie and Wu Tianzhun.High-Performance 3D Platinum Nanostructure Coating on fMEA for Stimulation/Recording[J].Rare Metal Materials and Engineering,2020,49(10):3536~3543.]
High-Performance 3D Platinum Nanostructure Coating on fMEA for Stimulation/Recording
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Received:October 25, 2019  Revised:December 04, 2019
Key words: flexible microelectrode array  3D coating  neural stimulation and recording  ipedance  brrier crystal morphology
Foundation item:国家重点研究开发项目(2016YFC010324)、国家自然科学基金项目(61741505)、深圳科技研究计划(JCYJ201708)
Author NameAffiliation
Huang Zhaoling,Zeng Qi,Wanying Li,Huang Jinjiang,Qin Shuijie and Wu Tianzhun  
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      Flexible microelectrode array (fMEA) is one of the key devices for neural stimulation and recording. For its specific implantation environment, its design and manufacture should meet the requirements of biocompatibility, high resolution, flexibility and low impedance to ensure safe and long-term effective stimulation. In this paper, an fMEA fabrication process was proposed by using flexible polyimide matrix with a variety of 3D platinum nanostructure coatings were fabricated by electrochemical plating at 200 mm stimulation site. Compared with the surface of bare platinum coating, the impedance of 3D micro-structure coating decreased by 94.77% at 1 kHz, reaching 0.824 kΩ and breaking through the limit of 1 kΩ. Compared with other coated electrodes, the CSCc of the novel barrier crystal morphology coated electrodes can be increased by 6.67 times to 13.47 mC cm-2. The safe charge injection ability is 19.6 times higher than that of Pt-gray, reaching 2.53 mC cm-2. Therefore, this electroplating coating structure and process is promising for effective nerve stimulation/recording in various applications, and have broad application prospects in biomedical fields.