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齐东丽,陈建金,刘俊,吕伟,宋健宇,沈龙海.钼添加对CrN涂层抗氧化性能的影响[J].稀有金属材料与工程(英文),2021,50(5):1505~1512.[Qi Dongli,Chen Jianjin,Liu Jun,Lv Wei,Song Jianyu and Shen Longhai.Influence of Molybdenum Addition on Oxidation Resistance of CrN Coatings[J].Rare Metal Materials and Engineering,2021,50(5):1505~1512.]
Influence of Molybdenum Addition on Oxidation Resistance of CrN Coatings
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Received:December 29, 2019  
Key words: Cr-Mo-N coating  magnetron sputtering  Raman  oxidation resistance
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Qi Dongli,Chen Jianjin,Liu Jun,Lv Wei,Song Jianyu and Shen Longhai  
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      To investigate the effect of molybdenum (Mo) addition on microstructure and oxidation resistance of CrN coating, Cr-Mo-N coatings with different Mo contents were fabricated on silicon wafers and high speed steel by reactive magnetron sputtering and annealed at elevated temperatures from 500 °C to 800 °C in air for 1 h. The coatings before and after annealing were characterized by X-ray diffraction (XRD), Raman spectroscopy and scanning electron microscope (SEM). The results show that the as-deposited CrN and Cr-Mo-N coatings all exhibit B1 face-centered cubic (fcc) phase based on the CrN lattice. Mo ions substitute for Cr ions in Cr-N lattice, forming the solid solution Cr-Mo-N coatings. At 600 °C, XRD and Raman spectra show that the MoO3 phase forms in Cr-Mo-N coatings with higher Mo contents, indicating a coarser surface with higher oxygen content. At 700 °C, the cross sectional morphology of the CrN coating exhibits loose columnar grains with some porous regions due to the internal stress while the Cr-Mo-N coating shows the dense columnar structure. This study reveals that the Cr-Mo-N coatings with lower Mo contents (<17at%) have better oxidation resistance than the CrN coating does.