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王浩琦,孙丽,欧伊翔,1,金小越,张旭,华青松,庞盼,罗军,陈琳,廖斌,欧阳晓平,鲍曼雨.深振荡磁控溅射制备柔性硬质纳米涂层的研究进展[J].稀有金属材料与工程(英文),2021,50(8):2993~3002.[Wang Haoqi,Sun Li,Ou Yixiang,1,Jin Xiaoyue,Zhang Xu,Hua Qingsong,Pang Pan,Jun Luo,Chen Lin,Liao Bin,Ouyang Xiaoping and Bao Manyu.Research progress of flexible hard coating deposited by deep oscillating magnetron sputtering[J].Rare Metal Materials and Engineering,2021,50(8):2993~3002.]
Research progress of flexible hard coating deposited by deep oscillating magnetron sputtering
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Received:June 23, 2020  
DOI:
Key words: Deep oscillation magnetron sputtering  high power pulsed magnetron sputtering  Flexible hard coatings  Friction and wear
Foundation item:国家科技重大专项(2017-VII-0012-0107), 国家自然科学基金联合基金重点项目(U1865206), 广东省重点领域研发计划 (2019B090909002),2020年北科萌芽计划项目
Author NameAffiliation
Wang Haoqi,Sun Li,Ou Yixiang,1,Jin Xiaoyue,Zhang Xu,Hua Qingsong,Pang Pan,Jun Luo,Chen Lin,Liao Bin,Ouyang Xiaoping and Bao Manyu  
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Abstract:
      Flexible hard coatings with high density, high surface integrity and smooth surface morphology exhibit simultaneously high hardness, high toughness and high crack resistance which represent a new class of high-performance coatings. However, their depositions are a hard work. Deep oscillation magnetron sputtering (DOMS) is a novel high-power impulse magnetron sputtering, which become a hotspot in tribological hard coatings around world. Using a series of modulated micro-pulse of voltage oscillation, DOMS can achieve virtually arc-free high-power discharge to generate highly ionized target species to obtain high dense plasma with low ion energy and high ion flux. These features allow to prepare high-performance nanostructured coating, which can be modulated by composition, structure and properties using a series of micro-pulse under optimized deposition conditions. In this paper, we summarize characteristics of flexible hard nanostructured coatings and research progress in recent years of flexible hard nanostructured coatings deposited by DOMS technology.