In order to improve the wear resistance of titanium alloy, and to prevent the deformation of thin-walled components, taking Ti6Al4V alloy as the object, the effect of shot peening pretreatment on the low-temperature nitriding of titanium alloy was studied. The results show that the pretreatment of shot peening (SP) can effectively promote the plasma nitriding process at low temperature. Under the test conditions of 500 °C, with the increase of shot peening strength, nitriding efficiency of pretreated samples increases gradually, and the surface hardness, load-bearing capacity and the wear resistance of nitrided layer increase gradually. Compared with unpretreated nitrided samples (Ti6Al4V-PN), when the shot strength increases to 0.25 mmA, the surface hardness of the pretreated nitrided samples (SP(0.25)-PN) increases by 32.7% and the wear rate decreases by 42.3%. The goal of shot peening pretreatment to promote low-temperature plasma nitriding of Ti6Al4V alloy is well achieved.