In this work, to study the effect of Y on the high temperature oxidation resistance of alloy, different doses of rare earth Y were implanted on the surface of alloy by means of ion implantation. The characteristics of oxide scales were investigated by scanning electron microscopy (SEM), transmission electron microscope (TEM), X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD) methods. The oxidation process was observed in situ by VL200DX ultra high temperature confocal laser scanning microscope. The results show that the weight gain per unit area and the amount of spalling of Y-implanted samples reduced by 39.4% and 77.8% respectively, compared with the un-implanted Y samples. Y irons on the alloy surface were oxidized to Y2O3 preferentially, which promotes the formation of oxide film and inhibits the grain growth. In addition, Y2O3 at the grain boundary hinders the diffusion of metal cations through the grain boundary. Importantly, Y substituted for Mn2+and Cr3+ in MnCr2O4 spine, resulting in the information of vacancy defect. It relieve the internal stress of oxide layer and reduce the generation of cracks and holes that make oxide layer bond with the matrix closely.