To meet the development trend of functionalization and miniaturization of electronic products in recent decades, aluminum electrolytic capacitors are facing the same trend to achieve miniaturization and high electrical properties.SOne of the most effective ways to make it actualize is the preparation of high specific capacitance anode foil. By depositing a thin film that has high relative permittivity on aluminum foil, the permittivity of abode composite film as well as the specific capacitance of aluminum electrolytic capacity will both be largely enhanced.SIn this review, we systematically introduce the deposition techniques for the preparation of valve metal compounds for aluminum electrolytic capacitors. From the perspective of the film quality prepared by different deposition techniques, we expound the advantages and disadvantages of the various deposition techniques when preparing the anode composite foil for aluminum electrolytic capacitors. Further, we analyze the research progress of increasing the electric performance of anode foil by composite a valve metal thin film. Accordingly, several outlooks for promoting the practical applications of high specific capacitance aluminum electrolytic capacitors are proposed.